Expert answer:REAL Research Challenge Problem Materials science
Expert answer:Complete this exercise and write a short report that gives an overview of your understanding of the problem and answers the 4 questionsLink for FREE measurement tool: https://imagej.nih.gov/ij/
2017_mech_205_challenge_problem_1_.docx
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MECH 205: Intro to Materials Science
Real Research Challenge Problem:
Below is an image from my research at NIST and I think you all are equipped to solve to identify the
mechanism of deformation. This is a cross-sectional electron image of an extreme ultra-violet (EUV)
mask (used for lithography or printing or nanoscale electronic circuits by Intel). The EUV mask is
composed of a Ni capping layer followed by stacked layers of Molybdenum (Mo, dark layer) and Silicon
(Si, light layer) as shown in (a), all on top of a Silicon substrate.
It was proposed to try to use the helium ion beam to cut or “machine” the EUV mask, however other
unexpected phenomena occurred. First, there is an observed shrinking of the EUV mask thickness (b,c),
second, the layers become obscured in the top of the stack (c,d), and third there is an expansion and
ultimately, the formation of bubbles (d).
(a) Pristine EUV mask with no ion beam exposure. (b)-(d) Increasing helium ion beam dose from
1×1016 ions/cm2 to 1×1018 ions/cm2.
Given that pure Mo has BCC structure (density=10.28 g/cm3) and pure Si has diamond cubic structure
(density=2.33 g/cm3, see your book for more details on this structure), with the addition of small
amount of energy it is possible to form MoSi2 with body-centered tetragonal structure (where a =0.321
nm and c = 0.452 nm), as shown below.
Give an explanation of the problem and what you think is happening, then answer these questions.
Questions:
1) What are the point coordinates for the Silicon atoms in the MoSi2 system? Generate a model for
this and the crystal structures of pure (elemental) Silicon and Molybdenum using VMSE.
2) On average, what volume of space is occupied by each Mo and Si atom in their elemental crystal
forms and how much space is occupied by a molecule of MoSi2 (you should not use their atomic
radii but instead work backwards from density and crystal structure)? Which is more dense?
3) What could explain the phenomenon of initial shrinking and apparent “mixing” of the layers?
4) What could explain the bubbles that form at high dose? Why do they not form initially at low
dose?
…
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